✦ LIBER ✦

Modeling and experiments of microcrystalline silicon film deposited via VHF-PECVD

✍ Scribed by Chen, Yongsheng; Chen, Xiping; Jiao, Yuechao; Hao, Xiuli; Lu, Jingxiao; Yang, Shi-e

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SUBSTRATE EFFECT ON HYDROGENATED MICROCR

✍ H.D. Yang 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 595 KB

Deposition of microcrystalline silicon–c

✍ G. Ambrosone; U. Coscia; S. Lettieri; P. Maddalena; C. Minarini; S. Ferrero; A. 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 256 KB

Electronic transport properties of micro

✍ S. Okur; M. Güneş; O. Göktaş; F. Finger; R. Carius 📂 Article 📅 2004 🏛 Springer US 🌐 English ⚖ 203 KB

The study of the substrate temperature d

✍ Chen, Yongsheng; Chen, Xiping; Hao, Xiuli; Lu, Jingxiao; Yang, Shi-e 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 418 KB

Deposition of microcrystalline silicon s

✍ Ujjwal K. Das; Scott Morrison; Arun Madan 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 201 KB

Amorphous-silicon thin-film transistors

✍ B Stannowski; R.E.I Schropp; R.B Wehrspohn; M.J Powell 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 118 KB