Modeling and experimental study of pulse modulated ICP discharge: production of Ar highly excited states

✍ Scribed by Kang, Namjun; Gaboriau, Freddy; Oh, Soo-ghee; Ricard, André

• Book ID: 125485398
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 500 KB
• Volume: 20
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/20/3/035002