✦ LIBER ✦
Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
✍ Scribed by D. Paci; M. Mastrangeli; A. Nannini; F. Pieri
- Book ID
- 106342299
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 462 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0925-1030
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