Modeling and Characterization of MicroPirani Vacuum Gauges Manufactured by a Low-Temperature Film Transfer Process

✍ Scribed by Schelcher, G.; Fabbri, F.; Lefeuvre, E.; Brault, S.; Coste, P.; Dufour-Gergam, E.; Parrain, F.

• Book ID: 114563626
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 945 KB
• Volume: 20
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/jmems.2011.2162492