Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

✍ Scribed by Mukundan, Vikram; Ponce, Pierre; Butterfield, Holly E; Pruitt, Beth L

• Book ID: 121252265
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 642 KB
• Volume: 19
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/19/6/065008