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Model studies on the disposal of waste products resulting from the pyrolysis of CH3SiCl3 in CVD process

✍ Scribed by Andrzej Kwatera

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 659 KB
Volume: 16
Category: Article
ISSN: 0272-8842
DOI: 10.1016/0272-8842(90)90039-i

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