✦ LIBER ✦
Model predictions of feature-size-dependent step coverages by PVD aluminum: surface diffusion
✍ Scribed by T.S. Cale; T.H. Gandy; G.B. Raupp; M. Ramaswami
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 583 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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