Model of Subsurface Redistribution of Impurity Atoms and Radiation Defects upon Light Ion Irradiation of Si at Elevated Temperature

✍ Scribed by Kondrachuk, A. V.

• Book ID: 105381142
• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 247 KB
• Volume: 112
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211120155