✦ LIBER ✦
Model of impurity diffusion from an oxide source into silicon: Alicja Checielewska and Jerzy Pultorak Electron. Technology 12 (4), 69 (1979)
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 102 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0026-2692
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