✦ LIBER ✦
Model of bias sputtering in a dc-triode configuration applied to the production of Pd films: P Ziemann and E Kay,J Vac Sci Technol, 21 (3), 1982, 828–832
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 175 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.