The resolution of photolithographic processes has advanced to the point that difficulties, such as line-edge roughness, associated with phenomena occurring at molecular length scales are becoming important. In order to control these phenomena, it is necessary to understand them. To that end, a numer
Model for reaction-assisted polymer dissolution in LIGA
โ Scribed by Richard S. Larson
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 291 KB
- Volume
- 97
- Category
- Article
- ISSN
- 0021-8995
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Although reactions in substrate suspension are employed in industry for several bioconversion processes, there appears to be no quantitative model available in the literature to rationalize the optimization of these processes. We present a simple model that incorporates the kinetics of substrate dis
The initial dissolution characteristics of an organic soluble benzophenone-containing polyimide (BCPI) film were studied by using a microscopic method and laser interferometry, which could inspect the initial dissolution process at larger and smaller experimental times, respectively. Results from a