✦ LIBER ✦
Model for calculating low-current moderate-pressure RF discharges with photon-driven secondary electron photoemission from the electrode surface
✍ Scribed by I. Ya. Baranov; A. V. Koptev
- Book ID
- 111442829
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2007
- Tongue
- English
- Weight
- 223 KB
- Volume
- 33
- Category
- Article
- ISSN
- 1063-780X
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