✦ LIBER ✦
Model-based directional solidification of semiconductor materials by the VGF-technique using multi-zone cold wall furnace technology
✍ Scribed by D Hofmann; T Jung; N Schäfer; D Zemke; G Müller
- Book ID
- 108026783
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 587 KB
- Volume
- 173
- Category
- Article
- ISSN
- 0921-5093
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