Model analysis of effect of diffraction focus characteristics of microlens arrays on parallel laser direct writing quality

✍ Scribed by Jiubin Tan; Mingguang Shan; Jian Liu; Hui Zhang; Chenguang Zhao

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 244 KB
• Volume: 277
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2007.05.013