Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy

✍ Scribed by Alvaro San Paulo; Emmanuel Quevy; Justin Black; Roger T. Howe; Richard White; Jeffrey Bokor

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 443 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.223