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MOCVD of Silver Thin Films from the (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato)-silver[bis(trimethylsilyl)acetylene] Complex

✍ Scribed by K.-M. Chi; Y.-H. Lu

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 370 KB
Volume: 7
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(200105)7:3<117::aid-cvde117>3.0.co;2-7

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✦ Synopsis

A series of silver compounds of empirical formula (b-diketanato)Ag(BTMSA) (where BTMSA is bis(trimethylsilyl)acetylene) were prepared from reactions of Ag 2 O with b-diketone in the presence of BTMSA. All these compounds were characterized by elemental analyses, nuclear magnetic resonance (NMR), and infrared (IR) spectroscopic methods. X-ray diffraction (XRD) analysis of the crystal structure of (Btfac)Ag(BTMSA) shows a monomeric silver species in the solid state. Hot-wall CVD experiments revealed that pure silver thin films can be deposited by using (hfac)Ag(BTMSA) as the precursor in the temperature range 150±250 C.

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