Atomic Layer Deposition of Platinum Oxid
Atomic Layer Deposition of Platinum Oxide and Metallic Platinum Thin Films from Pt(acac) 2 and Ozone
β
HaΜmaΜlaΜinen, Jani; Munnik, Frans; Ritala, Mikko; LeskelaΜ, Markku
π
Article
π
2008
π
American Chemical Society
π
English
β 841 KB