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MOCVD of Platinum Films from (CH3)3CH3CpPt and Pt(acac)2: Nanostructure, Conformality, and Electrical Resistivity

✍ Scribed by J. Goswami; C.-G. Wang; W. Cao; S.K. Dey


Book ID
102136845
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
445 KB
Volume
9
Category
Article
ISSN
0948-1907

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