✦ LIBER ✦
MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications
✍ Scribed by M. Lemberger; F. Schön; T. Dirnecker; M. P. M. Jank; L. Frey; H. Ryssel; A. Paskaleva; S. Zürcher; A. J. Bauer
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 425 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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