✦ LIBER ✦

MOCVD — Current state and future

✍ Scribed by Hiroshi Kukimoto

Book ID: 107790298
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 247 KB
Volume: 95
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(89)90418-1

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## Abstract This paper summarizes current understanding and predictive simulations of gettering processes predominantly applied in silicon photovoltaics. Special emphasis is put on various processes limiting gettering efficiency and kinetics, i.e. the mobility of interstitially dissolved metal spec