✦ LIBER ✦
Mobility study on RIE etched silicon surfaces using SF6/O2 gas etchants
✍ Scribed by Syau, T.; Baliga, B.J.
- Book ID
- 114535248
- Publisher
- IEEE
- Year
- 1993
- Tongue
- English
- Weight
- 804 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-9383
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