Mobility and Velocity Enhancement Effects of High Uniaxial Stress on Si (100) and (110) Substrates for Short-Channel pFETs

✍ Scribed by Mayuzumi, S.; Yamakawa, S.; Kosemura, D.; Takei, M.; Nagata, K.; Akamatsu, H.; Wakabayashi, H.; Amari, K.; Tateshita, Y.; Tsukamoto, M.; Ohno, T.; Ogura, A.; Nagashima, N.

• Book ID: 114619979
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 576 KB
• Volume: 57
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2010.2045703