Mo-based EUV multilayer filters with enhanced thermal stability

✍ Scribed by M. N. Drozdov; E. B. Kluenkov; A. Ya. Lopatin; V. I. Luchin; A. E. Pestov; N. N. Salashchenko; N. N. Tsybin; N. I. Chkhalo; L. A. Shmaenok

• Book ID: 111502084
• Publisher: Allerton Press Inc
• Year: 2011
• Tongue: English
• Weight: 172 KB
• Volume: 75
• Category: Article
• ISSN: 1062-8738
• DOI: 10.3103/s1062873811010072