Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement
✍ Scribed by K.S. Sim; K.K. Law; C.P. Tso
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 542 KB
- Volume
- 70
- Category
- Article
- ISSN
- 1059-910X
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✦ Synopsis
Abstract
A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed Lagrange time delay estimation auto‐regression (MLTDEAR)‐based interpolator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real‐time in cases where specimen drift is presented in the SEM image. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.