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Mixed hydrazido amido/imido complexes of tantalum, hafnium and zirconium: potential precursors for metal nitrideMOCVD

✍ Scribed by Baunemann, Arne ;Kim, Younsoo ;Winter, Manuela ;Fischer, Roland A.


Book ID
120939193
Publisher
Royal Society of Chemistry
Year
2006
Tongue
English
Weight
346 KB
Volume
1
Category
Article
ISSN
1477-9226

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