✦ LIBER ✦
Mix-and-match EBP/optical lithography of 1 Mbit chips
✍ Scribed by W. Zapka; S. Sonchik; U. Behringer; W. Haug; K. Meissner; S. Silverman; W. Ziemlich; H. Bohlen; W. Smith
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 391 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.