Mismatch of dielectric constants at the interface of nanometer metal-oxide-semiconductor devices with high-Kgate dielectric impacts on the inversion charge density

✍ Scribed by LING-FENG MAO

• Book ID: 107588942
• Publisher: Springer-Verlag
• Year: 2011
• Tongue: English
• Weight: 190 KB
• Volume: 76
• Category: Article
• ISSN: 0304-4289
• DOI: 10.1007/s12043-011-0052-0