✦ LIBER ✦
Mirror effect in PECVD reactor and its explanation via MC-PIC computer simulation
✍ Scribed by O. Brzobohatý; V. Buršiková; D. Trunec
- Book ID
- 105721168
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 376 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0011-4626
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