✦ LIBER ✦
Minimizing variation in the electrical characteristics of gate-all-around thin film transistors through the use of multiple-channel nanowire and NH3 plasma treatment
✍ Scribed by Po-Chun Huang; Lu-An Chen; Chen-Chia Chen; Jeng-Tzong Sheu
- Book ID
- 113797912
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 645 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0167-9317
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