✦ LIBER ✦
Minimizing the Carbon Content of Thin Ruthenium Films by MOCVD Precursor Complex Design and Process Control
✍ Scribed by A. Schneider; N. Popovska; I. Jipa; B. Atakan; M. A. Siddiqi; R. Siddiqui; U. Zenneck
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 502 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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