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Migration of Si adatom on strained Si(1 1 1) surfaces

✍ Scribed by T. Hoshino; M. Hata; M. Tsuda


Book ID
117215802
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
194 KB
Volume
481
Category
Article
ISSN
0039-6028

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Highly sensitive strained AlN on Si(1&#x
✍ M. Placidi; J.C. Moreno; P. Godignon; N. Mestres; E. Frayssinet; F. Semond; C. S πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 414 KB

In this study, we report two methods to fabricate freestanding single-crystalline aluminium nitride micromechanical device structures on Si(1 1 1) substrates. A method based only on Si etching techniques is demonstrated, and the differences with the conventional process are detailed. The mechanical