✦ LIBER ✦
Microwave velocity and impedance tuning of traveling-wave modulator using ion implantation for monolithic integrated photonic systems
✍ Scribed by Sang-Woo Seo; John Yan; Jong-Hwa Baek; Francisco M. Soares; Ronald Broeke; Anh-Vu Pham; S. J. Ben. Yoo
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 680 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
We present performance improvement in InP traveling‐wave modulators (TWMs) using a periodic ion implantation on coplanar waveguide. Fabricated TWMs show the successful velocity and impedance tuning with return loss of lower than −12dB and reduced effective microwave refractive index of approximately 4 across the measured frequency range up to 50GHz. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 2151–2155, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23607