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Microtribological properties of silicon and silicon coated with self-assembled monolayers: effect of applied load and sliding velocity

✍ Scribed by Wolfram Hild; Syed Imad-Uddin Ahmed; Gudrun Hungenbach; Matthias Scherge; Juergen A. Schaefer


Book ID
106551047
Publisher
Springer US
Year
2006
Tongue
English
Weight
339 KB
Volume
25
Category
Article
ISSN
1023-8883

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## Abstract A self‐assembled monolayer (SAM) of fluoroalkyl silane (FAS) (CF~3~(CF~2~)~5~(CH~2~)~2~SiCl~3~) was deposited on the surface of silicon wafers, aiming to enhance its stability and to reduce the inflammatory response in the central nervous system. Following implantation of the FAS SAM co