Microsystems and Nanotechnology

✍ Scribed by Zhi-Jian Li, Tian-Ling Ren (auth.), Zhaoying Zhou, Zhonglin Wang, Liwei Lin (eds.)

• Publisher: Springer-Verlag Berlin Heidelberg
• Year: 2012
• Tongue: English
• Leaves: 1011
• Edition: 1
• Category: Library

✦ Synopsis

“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies.

Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

✦ Table of Contents

Front Matter....Pages N1-xxii
Front Matter....Pages 1-1
Information Electronics in the Nanotechnology Era....Pages 3-43
Micro/Nano Fluidics Mechanics and Transducers....Pages 45-69
Material Issues for Microsystems....Pages 71-113
Nanopiezotronics and Nanogenerators....Pages 115-147
Electron Transport in Single Molecules and Nanostructures....Pages 149-183
Front Matter....Pages 185-185
Introduction to MEMS....Pages 187-206
Microelectromechanical Sensors....Pages 207-260
MEMS Design....Pages 261-285
MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachining....Pages 287-352
Optical MEMS and Nanophotonics....Pages 353-414
Introduction to MEMS Packaging....Pages 415-446
Front Matter....Pages 447-447
Advancement of Laser-Assisted and Roller-Based Nanoimprinting Technology....Pages 449-493
The Application of STM and AFM in Nanoprocess and Fabrication....Pages 495-511
Nanoscale Fabrication....Pages 513-577
Integrated Nanotechnology Based on MEMS....Pages 579-606
Front Matter....Pages 607-607
Applications of Microelectro-Mechanical Systems....Pages 609-618
Microelectromechanical Sensor-Based System....Pages 619-651
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry....Pages 653-719
MEMS in Automobiles....Pages 721-757
Biochip....Pages 759-818
Front Matter....Pages 607-607
Micro/Nano Technologies and Their Biological and Medical Applications....Pages 819-851
Microfluidic Platforms for Lab-On-A-Chip Applications....Pages 853-895
Front Matter....Pages 897-897
Development and Prospects....Pages 899-929
Back Matter....Pages 931-1004

✦ Subjects

Nanotechnology