Microsystem Technology

✍ Scribed by Wolfgang Menz, Jürgen Mohr, Oliver Paul

Publisher: Wiley-VCH
Year: 2001
Tongue: English
Leaves: 514
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

📜 SIMILAR VOLUMES

Etching in Microsystem Technology

📁 Etching in Microsystem Technology

✍ Michael Kohler 📂 Library 📅 1999 🌐 English

Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these mate

Microsystem Technology and Microrobotics

📁 Microsystem Technology and Microrobotics

✍ Sergej Fatikow, Ulrich Rembold (auth.) 📂 Library 📅 1997 🏛 Springer-Verlag Berlin Heidelberg 🌐 English

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many o

Bonding in Microsystem Technology

📁 Bonding in Microsystem Technology

✍ Dr. Jan A. Dziuban (auth.) 📂 Library 📅 2006 🏛 Springer Netherlands 🌐 English

Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. Followed by the presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process fl

Etching in Microsystem Technology

📁 Etching in Microsystem Technology

✍ Dr. Michael Kohler(auth.) 📂 Library 📅 1999 🏛 Wiley-VCH Verlag GmbH 🌐 English

Bonding in Microsystem Technology

📁 Bonding in Microsystem Technology

✍ Donald Rapp 📂 Library 📅 2006 🏛 Springer 🌐 English

Bonding in Microsystem Technology concerns the exciting field of microsystems (known under varying names as: MEMS, µTAS (analytical or chemical Microsystems), MOEMS: the micro-miniature devices, utilizing extremely miniaturized mechanical structures made usually from silicon by wet deep

Microsystems Technology: Fabrication, Te

📁 Microsystems Technology: Fabrication, Test & Reliability

✍ Jumana Boussey 📂 Library 📅 2003 🌐 English

Microsystems technology is discussed from various perspectives—a review of currently used microsystem techniques, a series of case studies dealing with major applications, and proposals for packaging, testing, reliability and failure analysis techniques, and CAO tools and methods.