Microswitches and microrelays with a view toward microwave applications
โ Scribed by Paul M. Zavracky; Nicol E. McGruer; Richard H. Morrison; David Potter
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 358 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1096-4290
No coin nor oath required. For personal study only.
โฆ Synopsis
In this paper, we discuss our work on surface micromachined microswitches and microrelays that are based on electroplated materials. We have successfully fabricated devices with lifetimes exceeding 10 7 cycles cold switched at current levels exceeding 10 ma. Contact resistance is consistently below one ohm for a single contact. Multiple contact devices have much lower effective contact resistance.
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