Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm

✍ Scribed by Ming-Chung Liu; Cheng-Chung Lee; Masaaki Kaneko; Kazuhide Nakahira; Yuuichi Takano

• Book ID: 108287905
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 490 KB
• Volume: 492
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.06.038