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Microstructure of gold grown by ion-induced deposition

✍ Scribed by Jae Sang Ro; Carl V. Thompson; J. Melngailis

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
360 KB
Volume
258
Category
Article
ISSN
0040-6090

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Microstructures of AlGaN/AlN/Si (111) Gr
Microstructures of AlGaN/AlN/Si (111) Grown by Metalorganic Chemical Vapor Deposition
✍ Xi, Dongjuan ;Zheng, Youdou ;Chen, Peng ;Zhao, Zuoming ;Chen, Ping ;Xie, Shiyong πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 101 KB πŸ‘ 2 views

In this paper the X-ray photoelectron spectrum and the Auger electron spectrum were used to study the microstructures of AlGaN/AlN/Si (111) grown by metal organic chemical vapor deposition. The results indicated that a broad transition region, about 20 nm, was present at the interface of AlN/Si and