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Microstructure fabrication with a CO2 laser system: characterization and fabrication of cavities produced by raster scanning of the laser beam

✍ Scribed by Jensen, Martin F.; Noerholm, Mikkel; Christensen, Leif H�jslet; Geschke, Oliver

Book ID: 121700395
Publisher: Royal Society of Chemistry
Year: 2003
Tongue: English
Weight: 521 KB
Volume: 3
Category: Article
ISSN: 1473-0197
DOI: 10.1039/b308153b

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