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Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructues

✍ Scribed by M.J. Mörschbächer; D.L. da Silva; P.F.P. Fichtner; E. Oliviero; M. Behar; F.C. Zawislak; B. Holländer; M. Luysberg; S. Mantl; R. Loo; M. Caymax


Book ID
113822971
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
360 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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