Microstructure and related properties of vapour deposited amorphous Sb2Se3 thin films

✍ Scribed by K Starbova; J Dikova; V Mankov; N Starbov

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 366 KB
• Volume: 47
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(96)00200-x

✦ Synopsis

The initial growth stages and the growth morphology of 10-1000 nm thick films of amorphous Sb,Se, obtained by thermal evaporation were studied under a broad range of vacuum deposition conditions. General grain growth phenomena with increasing film thickness were observed on a film free surface resulting in a columnar internal structure. The formation of inclined columns in obliquely deposited films occurred, with the vapour incidence angle being related to the column orientation via 'tangent rule'. it is shown that the film microhardness and refractive index are structurally dependent. The significance of the results obtained for the application of Sb,Se, films in optical recording systems is discussed.