✦ LIBER ✦
Microstructure and properties of aluminum contacts formed on GaAs(100) by low pressure chemical vapor deposition with dimethylethylamine alane source
✍ Scribed by V. Shashkin; S. Rushworth; V. Danil'tsev; A. Murel; Yu. Drozdov; S. Gusev; O. Khrykin; N. Vostokov
- Book ID
- 110609365
- Publisher
- Springer US
- Year
- 2001
- Tongue
- English
- Weight
- 866 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0361-5235
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