✦ LIBER ✦
Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system
✍ Scribed by Shengli Ma; Bin Xu; Guizhi Wu; Yanfeng Wang; Fei Ma; Dayan Ma; Kewei Xu; Tom Bell
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 748 KB
- Volume
- 202
- Category
- Article
- ISSN
- 0257-8972
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