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Microstructure and mechanical properties of nanocrystalline Al–Cr–B–N thin films

✍ Scribed by C. Tritremmel; R. Daniel; M. Lechthaler; H. Rudigier; P. Polcik; C. Mitterer


Book ID
118057919
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
1000 KB
Volume
213
Category
Article
ISSN
0257-8972

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Cr-Zr-Si-N thin films with various Zr contents were deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. In addition, a Cr-Zr-N film without Si addition was fabricated as a reference. The influence of Zr on the constitution, microstructure, mechanical, tribological and e