Microstructure and growth mechanism of PtAl2O3 co-sputtered nanocermet films studied by SAXS, TEM and AFM
✍ Scribed by C. Sella; M. Mâaza; B. Pardo; F. Dunsteter; J.C. Martin; M.C. Sainte Catherine
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 302 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0378-4371
No coin nor oath required. For personal study only.
✦ Synopsis
The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt-AlzO 3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry, transmission electron microscopy and atomic force microscopy. The experimental results show that (i) the diameter of platinum clusters increases as a function of film thickness, annealing temperature and metal concentration and (ii) a columnar growth is observed whose morphology also depends on the previous parameters and on the growth direction.