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Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains

✍ Scribed by R. Coq Germanicus; E. Picard; B. Domenges; K. Danilo; R. Rogel


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
945 KB
Volume
253
Category
Article
ISSN
0169-4332

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