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Microstructural investigation of Sn nanoclusters in double-energy implanted and annealed SiO2 layers with cross-sectional TEM
✍ Scribed by A. Markwitz; R. Grötzschel; K.H. Heinig; L. Rebohle; W. Skorupa
- Book ID
- 114171145
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 649 KB
- Volume
- 152
- Category
- Article
- ISSN
- 0168-583X
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