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Microstructural characteristics and carbon content of Al2O3films as a function of deposition parameters

✍ Scribed by J. Guzmán-Mendoza; M. Garcia-Hipolito; M. Aguilar-Frutis; C. Falcony


Book ID
111591083
Publisher
Springer US
Year
2004
Tongue
English
Weight
321 KB
Volume
15
Category
Article
ISSN
0957-4522

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