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Microstructural characterisation of tungsten coatings deposited using plasma sputtering on Si substrates

✍ Scribed by Vassallo, E.; Caniello, R.; Canetti, M.; Dellasega, D.; Passoni, M.

Book ID: 122267680
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 864 KB
Volume: 558
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.03.050

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