Microstructural change and interfacial reactions of Pt/Ti thin films on SiNx/Si during annealing in various ambients

✍ Scribed by Dong-Chan Kim; Tae Gon Lee; Young-Ho Kim

• Book ID: 110270797
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 287 KB
• Volume: 10
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1008947612157