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Microstructural and optical properties of ZrON/Si thin films

โœ Scribed by Atuchin, V.V.; Kruchinin, V.N.; Hoong Wong, Yew; Yew Cheong, Kuan


Book ID
121956899
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
737 KB
Volume
105
Category
Article
ISSN
0167-577X

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